Lam Research Corporation (LRCX)

業務介紹

林研究公司設計、製造、銷售、翻新和維修用於集成電路製造的半導體加工設備。該公司提供以下產品:

ALTUS系統用於沉積鎢金屬化應用的共形薄膜;SABRE電化學沉積產品用於銅互連轉換,提供銅鑲嵌製造;SOLA紫外線熱處理產品用於薄膜處理;以及VECTOR等離子增強化學氣相沉積原子層沉積產品。

該公司還提供SPEED高密度等離子化學氣相沉積產品用於填隙;以及Striker單片原子層沉積產品用於介電薄膜解決方案。

此外,該公司還提供Flex用於介電蝕刻應用;Kiyo用於導體蝕刻應用;Syndion用於穿硅孔蝕刻應用;以及Versys金屬產品用於金屬蝕刻工藝。

該公司還提供Coronus斜邊清潔產品以提高晶圓產量;Da Vinci、DV-Prime、EOS和SP系列產品以解決各種晶圓清洗應用;以及Metryx質量測量系統用於半導體晶圓製造中的高精度實時質量測量。

該公司在美國、中國、歐洲、日本、韓國、東南亞、台灣和國際上向半導體行業銷售其產品和服務。林研究公司成立於1980年,總部位於加利福尼亞州弗里蒙特。



Lam Research Corporation is a prominent supplier of equipment vital for semiconductor processing, encompassing its design, production, sales, repair, and ongoing maintenance. These sophisticated systems are fundamental for the creation of integrated circuits. The company's extensive product catalog features a variety of deposition technologies. For tungsten metallization, they provide ALTUS systems that deposit conformal films. SABRE products excel in electrochemical deposition, crucial for copper interconnect transitions and enabling copper damascene manufacturing. SOLA utilizes ultraviolet thermal processing for film treatments, while VECTOR delivers plasma-enhanced chemical vapor deposition (CVD) and atomic layer deposition (ALD) solutions. Furthermore, SPEED addresses gapfill applications with its high-density plasma CVD products, and Striker is engineered for single-wafer atomic layer deposition of dielectric films. Beyond deposition, Lam Research offers a comprehensive suite of etching tools. Flex is designed for dielectric etch applications, Kiyo handles conductor etch processes, Syndion specializes in through-silicon via etching, and Versys metal products are used for metal etch processes. The company's offerings also extend to specialized solutions like Coronus, which enhances die yield through bevel cleaning. For various wafer cleaning requirements, Lam Research supplies multiple product lines, including Da Vinci, DV-Prime, EOS, and SP series. Additionally, Metryx mass metrology systems provide precise, in-line mass measurement capabilities for semiconductor wafer manufacturing. Lam Research serves the global semiconductor industry, distributing its technologies and services across the United States, China, Europe, Japan, Korea, Southeast Asia, Taiwan, and other international markets. Established in 1980, the company maintains its corporate headquarters in Fremont, California.

公司網址

https://www.lamresearch.com